Riber has launched a new innovative robotic system, the MPVD300 reactor. Based on a high vacuum deposition system (UHV)
and compatible with existing silicon FAB industry standards, the MPVD
300 provides unrivalled precision of control and composition uniformity
defects of less than 1% over 300mm (monoatomic layer precision).
Riber sayst he new machine willhelp make new ultra-fast microprocessors and high-capacity MRAM.
Fully automated, Riber's MPVD300 is the only modular system for high vacuum deposition that can beconnected up directly to the silicon production line. The first system will be shipped in July to a major manufacturer in Asia.
Posted: Jul 02,2009 by Ron Mertens