Tegal Corporation was involved in plasma etch and deposition systems that enable the production of IC memory and related microelectronics devices.
Tegal supplied etch solutions to makers of advanced "non-volatile" ferroelectric (FeRAM) and magnetic (MRAM) devices. In 2010, the company sold its etch business to SPTS.
2201 S. McDowell Blvd.
Petaluma, CA 94954