Jusung Engineering to supply MRAM etching and deposition equipment to Crocus's Russia fab
Jusung Engineering announced today that they will supply integrated etch and deposition system for Crocus Nanoelectronics (CNE)'s advanced OLED production. CNE is Crocus Technology's and RUSNANO joint-venture that aims to produce MRAM chips in Russia.
Jusung Engineering will supply the Genaon Plus MRAM etching equipment. this is a core process tool that can etch non-volatile materials such as platinum, manganese and cobalt. According to Jusung, this plasma etching equipment is specialized for magnetic metal layers patterning and it can completely eliminate polymer residue left behind on the side walls during the etching process.
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Posted: Sep 17,2013